標準號：ANSI/IEST/ISO 14644-2-2000
中文標準名稱：潔凈室和相關控制環境.第2部分:證明持續符合IEST/ISO 14644-1-1999標準要求的試驗和監測規范
英文標準名稱：Cleanrooms and associated controlled environments--Part 2: Specifications for testing and monitoring to prove continued compliance with IEST/ISO 14644-1:1999
標準類型：N64
發布日期：2003/7/29 12:00:00
實施日期：1999/12/31 12:00:00
中國標準分類號：N64
國際標準分類號：13.040.35
適用范圍：This part of ISO 14644 specifies requirements for periodic testing of a cleanroom or clean zone to prove its continued compliance with ISO 14644-1 for the designated classification of airborne particulate cleanliness. These requirements invoke the test described in ISO 14644-1 for classification of a cleanroom or clean zone. Additional tests are also specified, to be carried out in accordance with the requirements of this part of ISO 14644. Optional tests, to be applied at the user's discretion, are also identified. This part of ISO 14644 also specifies requirements for monitoring of a cleanroom or clean zone (hereafter referred to as an installation) to provide evidence of its continued compliance with ISO 14644-1 for the designated classification of airborne particulate cleanliness.