標準號：DIN EN ISO 14644-9-2012
中文標準名稱：凈化室和相關控制環境.第9部分:利用顆粒物濃度對表面潔凈度的分類(ISO 14644-9-2012).德文版本EN ISO 14644-9-2012
英文標準名稱：Cleanrooms and associated controlled environments.Part 9: Classification of surface cleanliness by particle concentration (ISO 14644-9:2012); German version EN ISO 14644-9:2012
標準類型：C47
發布日期：1999/12/31 12:00:00
實施日期：1999/12/31 12:00:00
中國標準分類號：C47
國際標準分類號：13.040.35
引用標準：ISO 14644-6-2007
適用范圍：This part of ISO 14644 establishes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics, are given in Annexes A to D.This part of ISO 14644 applies to all solid surfaces in cleanrooms and associated controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and products. The classification of surface cleanliness by particle concentration (SCP) is limited to particles between 0,05 pm and 500μm.