標準號：ISO 18516-2006
中文標準名稱：表面化學分析.俄歇電子光譜法和X射線光電子光譜法.橫向分辨率測定
英文標準名稱：Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral resolution
標準類型：G04
發布日期：1999/12/31 12:00:00
實施日期：1999/12/31 12:00:00
中國標準分類號：G04
國際標準分類號：71.040.40;71.040.50
適用范圍：This International Standard describes three methods for measuring the lateral resolution achievable in Augerelectron spectrometers and X-ray photoelectron spectrometers under defined settings. The straight-edgemethod is suitable for instruments where the lateral resolution is expected to be larger than 1 μm. The gridmethod is suitable if the lateral resolution is expected to be less than 1 μm but more than 20 nm. The goldislandmethod is suitable for instruments where the lateral resolution is expected to be smaller than 50 nm.Annexes A, B and C provide illustrative examples of the measurement of lateral resolution.