標準號：BS ISO 14606-2000
中文標準名稱：表面化學分析.濺射深度剖面測定.采用作為參考材料的成層系統*優化
英文標準名稱：Surface chemical analysis - Sputter depth profiling - Optimization using layered systems as reference materials
標準類型：G04
發布日期：2001/1/15 12:00:00
實施日期：2001/1/15 12:00:00
中國標準分類號：G04
國際標準分類號：71.040.40
適用范圍：This International Standard gives guidance on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry. This International Standard is not intended to cover the use of special multilayered systems such as delta doped layers.