標準號：BS EN 1518-1998
中文標準名稱：無損檢驗.漏泄試驗.質譜儀漏泄檢測器特性
英文標準名稱：Non-destructive testing - Leak testing - Characterization of mass spectrometer leak detectors
標準類型：H26
發布日期：1998/8/15 12:00:00
實施日期：1998/8/15 12:00:00
中國標準分類號：H26
國際標準分類號：19.100
適用范圍：This European Standard specifies terms and procedures for the characterization of mass spectrometer leak detectors (MSLD). It is not intended to give a complete set of specifications for an acceptance test but a description of procedures that can be used without particular calibration equipment. An MSLD has an integral high vacuum system for maintaining the sensing element (mass spectrometer) at low operating pressure and for establishing a partial pressure related to the incoming gas flow. This pressure is measured quantitatively by the mass spectrometer. Such instruments are able to selectively measure the flow of a tracer gas. In most cases the tracer gas will be helium, flowing in/out of an object through a leak. The methods described in this standard are applicable without restrictions to helium as the tracer gas. For other gases, additional precautions may be necessary. These methods are applicable to commonly-available MSLD, based on the present level of technology, which may be able to measure leak rates down to 10