標(biāo)準(zhǔn)號(hào)：ANSI/IEST/ISO 14644-5-2004
中文標(biāo)準(zhǔn)名稱：潔凈室和相關(guān)控制環(huán)境.第5部分:操作
英文標(biāo)準(zhǔn)名稱：Cleanrooms and associated controlled environments-Part 5: Operations
標(biāo)準(zhǔn)類型：C47
發(fā)布日期：2006/2/28 12:00:00
實(shí)施日期：1999/12/31 12:00:00
中國(guó)標(biāo)準(zhǔn)分類號(hào)：C47
國(guó)際標(biāo)準(zhǔn)分類號(hào)：13.040.35
適用范圍：This part of ISO 14644 specifies basic requirements for cleanroom operations. It is intended for those planning to use and operate a cleanroom. Aspects of safety that have no direct bearing on contamination control are not considered in this part of ISO 14644 and national and local safety regulations must be observed. This document considers all classes of cleanrooms used to produce all types of products. Therefore, it is broad in application and does not address specific requirements for individual industries. Methods and programmes for routine monitoring within cleanrooms are not covered in detail in this part of ISO 14644 but reference is made to ISO 14644-2 and ISO 14644-3 for monitoring particles and ISO 14698-1 and ISO 14698-2 for monitoring micro-organisms.