標準號：ANSI/IEST/ISO 14644-3-2005
中文標準名稱：潔凈室及其相關控制環境.第3部分:試驗方法
英文標準名稱：Cleanrooms and associated controlled environments - Part 3: Test methods
標準類型：C47
發布日期：2006/3/24 12:00:00
實施日期：1999/12/31 12:00:00
中國標準分類號：C47
國際標準分類號：13.040.35
適用范圍：This part of ISO 14644 specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow, in three possible occupancy states: as-built, at-rest and operational. The test methods recommend test apparatus and test procedures for determining performance parameters.